http://www.rsc.org/events/detail/8673/SPIE%20Advanced%20Lithography%202013%20%20Conference%20%26%20Exhibition This is a feed for event : SPIE Advanced Lithography 2013 Conference & Exhibition Thu, 11 Sep 2014 13:13:13 +0100 8673 8673 http://www.rsc.org/events/detail/8673/SPIE%20Advanced%20Lithography%202013%20%20Conference%20%26%20Exhibition Event dates: 24 - 28 February 2013<br/>Event summary: SPIE Advanced Lithography is the internationally recognized forum for reporting state-of-the-art research and development in optical lithography, resists, and more.<br/>Event Venue: San Jose Convention Center and San Jose Marriott, San Jose, CA, United States Thu, 11 Sep 2014 13:13:13 +0100 2014-09-11T13:13:13+01:00